✦ LIBER ✦
Analysis of the structure and defects in heteroepitaxial Si/CoSi2/Si layers produced by ion beam synthesis and rapid thermal annealing
✍ Scribed by Karen J. Reeson; Russell S. Spraggs; Russell M. Gwilliam; Brian J. Sealy
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 383 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0921-5107
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