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Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesized in thin SiO2 layers

✍ Scribed by M. Carrada; C. Bonafos; G. Ben Assayag; D. Chassaing; P. Normand; D. Tsoukalas; V. Soncini; A. Claverie

No coin nor oath required. For personal study only.

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