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Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin SiO[sub 2] layers by low energy ion implantation

✍ Scribed by Bonafos, C.

Book ID: 125452071
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 825 KB
Volume: 95
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1695594

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