Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films

✍ Scribed by P Normand; K Beltsios; E Kapetanakis; D Tsoukalas; T Travlos; J Stoemenos; J Van Den Berg; S Zhang; C Vieu; H Launois; J Gautier; F Jourdan; L Palun

• Book ID: 114164801
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 208 KB
• Volume: 178
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)00495-5