Formation of mono-layered gold nanoparticles in shallow depth of SiO2 thin film by low-energy negative-ion implantation

✍ Scribed by H. Tsuji; N. Arai; K. Ueno; T. Matsumoto; N. Gotoh; K. Adachi; H. Kotaki; Y. Gotoh; J. Ishikawa

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 358 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.103