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Ion beam synthesis of thin buried layers of SiO2 in silicon

✍ Scribed by PLF Hemment; KJ Reeson; JA Kilner; RJ Chater; C Marsh; GR Booker; GK Celler; J Stoemenos


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
590 KB
Volume
36
Category
Article
ISSN
0042-207X

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