Formation mechanism and structures of buried oxy-nitride layers produced by ion beam synthesis

✍ Scribed by KJ Reeson; PLF Hemment; JA Kilner; RJ Chater; CD Meekison; C Marsch; GR Booker; JR Davis

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 453 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90134-x