Buried layers of silicon oxy-nitride fabricated using ion beam synthesis: K J Reeson et al,Nucl Instrum Meth Phys Res,B32, 1988, 427–432

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 155 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90851-8