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Synthesis and analysis of buried SiC layers in monocrystalline silicon

✍ Scribed by P. Durupt; B. Canut; J.A. Roger; J. Pivot; J.P. Gauthier


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
440 KB
Volume
90
Category
Article
ISSN
0040-6090

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