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Formation of buried insulating island-like SiO2 layer in silicon

✍ Scribed by A.V. Frantskevich; A.K. Fedotov; N.V. Frantskevich; A.V. Mazanik; E.I. Rau; V.S. Kulinkayskas

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 309 KB
Volume: 124-125
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2005.08.096

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