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Energy and dose dependence of silicon top layer and buried oxide layer thicknesses in SIMOX substrates

✍ Scribed by U. Bussmamnn; A.K. Robinson; P.L.F. Hemment

Book ID
113282493
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
428 KB
Volume
55
Category
Article
ISSN
0168-583X

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