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Formation and characterisation of c-BN thin films deposited by microwave PECVD

✍ Scribed by Soltani, Ali; Thévenin, Philippe; Bath, Armand

Book ID: 121386011
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 498 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(00)00416-7

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