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Structure and properties of hydrogenated amorphous silicon carbide thin films deposited by PECVD

✍ Scribed by Yiying Zhang; Piyi Du; Ran Zhang; Gaorong Han; Wenjian Weng

Book ID: 116669999
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 178 KB
Volume: 354
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2006.11.047

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