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Fracture properties of hydrogenated amorphous silicon carbide thin films

✍ Scribed by Y. Matsuda; S.W. King; J. Bielefeld; J. Xu; R.H. Dauskardt

Book ID: 113415898
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 987 KB
Volume: 60
Category: Article
ISSN: 1359-6454
DOI: 10.1016/j.actamat.2011.10.014

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