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RBS study of amorphous silicon carbide films deposited by PECVD

✍ Scribed by J. Huran; I. Hotovy; A. P. Kobzev; N. I. Balalykin

Publisher: Springer
Year: 2004
Tongue: English
Weight: 570 KB
Volume: 54
Category: Article
ISSN: 0011-4626
DOI: 10.1007/bf03166522

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