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Structural evolution and electronic properties of phosphorus-doped hydrogenated amorphous silicon thin films deposited by PECVD

โœ Scribed by Jian He, Wei Li, Rui Xu, KangCheng Qi, YaDong Jiang


Book ID
118814372
Publisher
SP Science China Press
Year
2012
Tongue
English
Weight
525 KB
Volume
56
Category
Article
ISSN
1006-9321

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