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Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma

✍ Scribed by N.M.S. Marins; R.P. Mota; R.Y. Honda; P.A.P. Nascente; M.E. Kayama; K.G. Kostov; M.A. Algatti; N.C. Cruz; E.C. Rangel

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