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Physical and chemical properties of amorphous hydrogenated carbon films deposited by PECVD in a low self-bias range

✍ Scribed by N. Maître; S. Camelio; A. Barranco; Th. Girardeau; E. Breelle


Book ID
116668447
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
310 KB
Volume
351
Category
Article
ISSN
0022-3093

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