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Effect of bias voltage on the properties of hydrogenated amorphous carbon films fabricated on CoCrMo alloy by electron cyclotron resonance plasma enhance chemical vapor deposition (ECR-PECVD)

✍ Scribed by Xingrui Deng; Y.X. Leng; H.Sun; Nan Huang

Book ID: 113846535
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 442 KB
Volume: 18
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2011.06.069

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