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Hydrogenated amorphous carbon thin films deposited by plasma-assisted chemical vapor deposition enhanced by electrostatic confinement: structure, properties, and modeling

✍ Scribed by Dufrène, S. M. M.; Cemin, F.; Soares, M. R. F.; Aguzzoli, C.; Maia da Costa, M. E. H.; Baumvol, I. J. R.; Figueroa, C. A.


Book ID
125345059
Publisher
Springer
Year
2014
Tongue
English
Weight
760 KB
Volume
117
Category
Article
ISSN
1432-0630

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