✦ LIBER ✦

Properties and stability of hydrogenated amorphous silicon films with a low hydrogen content prepared by cyclic chemical vapour deposition and hydrogenation

✍ Scribed by S. Koynov; R. Schwarz; T. Fischer; R. Schorer

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 423 KB
Volume: 17
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(93)90084-z

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of hydrogenated amorphous si

Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic

Boron doping and post-hydrogenation effe

Boron doping and post-hydrogenation effects on optical gaps and urbach tails of amorphous hydrogenated silicon films prepared by chemical vapour deposition

✍ S.P. Coulibaly; F. De Chelle; J.M. Berger; J.P. Ferraton; A. Donnadieu; J. Magar 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 377 KB

Properties of hydrogenated amorphous sil

Properties of hydrogenated amorphous silicon carbide films prepared by plasma-enhanced chemical vapor deposition

✍ Dan Kuhman; Steve Grammatica; Frank Jansen 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 416 KB

Effect of deposition parameters on the p

Effect of deposition parameters on the properties of hydrogenated amorphous silicon films prepared by photochemical vapour deposition

✍ Abhijit De; Swati Ray; A.K. Barua 📂 Article 📅 1990 🏛 Elsevier Science ⚖ 447 KB

Microhardness and other properties of hy

Microhardness and other properties of hydrogenated amorphous silicon carbide thin films formed by plasma-enhanced chemical vapor deposition

✍ M.A. Bayne; Z. Kurokawa; N.U. Okorie; B.D. Roe; L. Johnson; R.W. Moss 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 287 KB

Ion permeability of amorphous hydrogen-

Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition

✍ F. Sittner; W. Ensinger 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 180 KB