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Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition

✍ Scribed by F. Sittner; W. Ensinger

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 180 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.074

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