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Properties of hydrogenated amorphous carbon thin films deposited by plasma-based ion implantation method

✍ Scribed by Ishihara, M.; Suzuki, M.; Watanabe, T.; Tsuda, O.; Nakamura, T.; Tanaka, A.; Koga, Y.


Book ID
122746788
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
617 KB
Volume
13
Category
Article
ISSN
0925-9635

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