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Optical properties of hydrogenated amorphous carbon films deposited from glow discharge plasma

✍ Scribed by S. G. Yastrebov; T. Allen; V. I. Ivanov-Omskii; V. Chan; S. Zukotynski


Book ID
110135968
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
56 KB
Volume
29
Category
Article
ISSN
1063-7850

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Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m