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Properties of rapidly deposited amorphous hydrogenated carbon films

โœ Scribed by Yoshikazu Nakamura; Yoshimasa Yamaguchi; Yoshihisa Watanabe; Shigekazu Hirayama


Publisher
Springer
Year
1992
Tongue
English
Weight
242 KB
Volume
27
Category
Article
ISSN
0022-2461

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Laser annealing study of PECVD deposited
โœ U. Coscia; G. Ambrosone; F. Gesuele; V. Grossi; V. Parisi; S. Schutzmann; D.K. B ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 524 KB

The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well