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Plasma spectroscopy—Glow discharge deposition of hydrogenated amorphous silicon

✍ Scribed by Akihisa Matsuda; Kazunobu Tanaka

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 943 KB
Volume: 92
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90200-0

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