Hot plasma box glow discharge reactor for production of uniform films of hydrogenated amorphous silicon alloys

✍ Scribed by D.M. Bhusari; L. Kale; A. Kumbhar; S. Sabane; S.T. Kshirsagar

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 512 KB
• Volume: 197
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90233-n