✦ LIBER ✦
Dynamic actinometric optical emission spectroscopy for the elucidation of plasma processes in the production of fluorinated amorphous hydrogenated carbon films from glow discharges
✍ Scribed by Steven F. Durrant; Mário A. Bica de Moraes
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 597 KB
- Volume
- 277
- Category
- Article
- ISSN
- 0040-6090
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