Threshold energy for the incorporation of reactive species in films of hydrogenated amorphous silicon obtained by glow discharge silane decomposition

✍ Scribed by S.A. Cruz; V.M. Méndez-Rosales

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 674 KB
• Volume: 151
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90240-9