✦ LIBER ✦
The analyses of an SiF4 plasma in an R.F. glow discharge for preparing fluorinated amorphous silicon thin films
✍ Scribed by N. Mutsukura; M. Ohuchi; S. Satoh; Y. Machi
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 581 KB
- Volume
- 109
- Category
- Article
- ISSN
- 0040-6090
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