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rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

✍ Scribed by Bubenzer, A.; Dischler, B.; Brandt, G.; Koidl, P.


Book ID
120260178
Publisher
American Institute of Physics
Year
1983
Tongue
English
Weight
619 KB
Volume
54
Category
Article
ISSN
0021-8979

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