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Optical and electrical properties of hydrogenated silicon oxide thin films deposited by PECVD

✍ Scribed by Shen, Hualong; Wang, Hui; Yan, Hui; Zhang, Ming; Pan, Qingtao; Jia, Haijun; Mai, Yaohua

Book ID
127358975
Publisher
Wuhan University of Technology
Year
2014
Tongue
English
Weight
684 KB
Volume
29
Category
Article
ISSN
1000-2413

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