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Substrate temperature influence of c-BN thin film formation by IBED

✍ Scribed by Tanabe, N.; Hayashi, T.; Iwaki, M.

Book ID
123363813
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
495 KB
Volume
1
Category
Article
ISSN
0925-9635

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## Abstract BN films deposited from a BF~3~ο£ΏNH~3~ precursor, under chemical vapour infiltration conditions, on plane sintered α‐SiC substrates were analysed by XPS. The films are non‐stoichiometric with an N/B atomic ratio of <1. They also contain significant amounts of oxygen atoms, homogeneously