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Influence of substrate temperature on phase formation in Al-Cr thin films

✍ Scribed by A. Saenz; D. Chavarri; R. Hernandez; V. M. Castaño


Publisher
Maney Publishing
Year
2001
Tongue
English
Weight
154 KB
Volume
4
Category
Article
ISSN
1432-8917

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## Abstract ZnO: Al films were prepared using low cost spray pyrolysis technique. The dependence of the physical properties on the substrate temperature was studied. The best films obtained at 500°C substrate temperature with preferred [002] orientation. The sheet resistance decreases with increase