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Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD

✍ Scribed by Florence Bosc; José Sanchez; Vincent Rouessac; Jean Durand

Book ID
114397081
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
188 KB
Volume
32
Category
Article
ISSN
1383-5866

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