✦ LIBER ✦

Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography

✍ Scribed by U. Mackens; U. Mescheder; F. Mund; H. Lüthje; H. Lifka; C.A.H. Juffermans; P.H. Woerlee; A.J. Walker

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A 0,25μm NMOS transistor fabricated with

✍ B. Breithaupt; H.H. David; R.-U. Ballhorn; E.P. Jacobs; W. Windbracke; G. Zwicke 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 279 KB

Fully scaled 0.5μm MOS circuits by synch

✍ R. Viswanathan; R. Acosta; D. Seeger; H. Voelker; A.D. Wilson; I. Babich; J. Mal 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 444 KB

Application of positive and negative ton

✍ U. Mescheder; U. Mackens; H. Lifka; R. Dammel; G. Pawloski; J. Theis 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 477 KB

Synchrotron radiation lithography applie

✍ A. Yoshikawa; T. Horiuchi; K. Deguchi; M. Miyake; E. Yamamoto; Y. Sakakibara; T. 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 360 KB

A MOSFET tetrode with 0.4 μm gates fabri

✍ J. Hersener; E. Piper; A. Wilhelm; G. Birkenstock 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 596 KB

Fabrication of high performance 512Kb SR

✍ R. Viswanathan; D. Seeger; A. Bright; T. Bucelot; A. Pomerene; K. Petrillo; P. B 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 485 KB