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A 0,25μm NMOS transistor fabricated with X-ray lithography

✍ Scribed by B. Breithaupt; H.H. David; R.-U. Ballhorn; E.P. Jacobs; W. Windbracke; G. Zwicker


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
279 KB
Volume
13
Category
Article
ISSN
0167-9317

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