✦ LIBER ✦
A MOSFET tetrode with 0.4 μm gates fabricated by mixed exposure of X-ray and DUV lithography
✍ Scribed by J. Hersener; E. Piper; A. Wilhelm; G. Birkenstock
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 596 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0167-9317
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