𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fabrication and surface functionalization of high aspect ratio plastic nanostructures

✍ Scribed by J. Shi; C. Peroz; G. Velve Casquillas; A. Pépin; M. Belotti; L.P. Xu; D. Peyrade; Y. Chen

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
840 KB
Volume
84
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Laser fabrication of high-aspect-ratio h
Laser fabrication of high-aspect-ratio holes and grooves in photoresist by time constant manipulation
✍ C. Egami; Y. Liu 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 419 KB

We report on the cw-laser fabrication of sharp-edged holes and grooves in organic-dye-sensitized photoresists for g-line or i-line by manipulating its intensity and scanning rate. The laser fabrication is performed to locally control the reaction time constant of the photoresist. By scanning a tight