✦ LIBER ✦
Laser fabrication of high-aspect-ratio holes and grooves in photoresist by time constant manipulation
✍ Scribed by C. Egami; Y. Liu
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 419 KB
- Volume
- 280
- Category
- Article
- ISSN
- 0030-4018
No coin nor oath required. For personal study only.
✦ Synopsis
We report on the cw-laser fabrication of sharp-edged holes and grooves in organic-dye-sensitized photoresists for g-line or i-line by manipulating its intensity and scanning rate. The laser fabrication is performed to locally control the reaction time constant of the photoresist. By scanning a tightly focused laser focal spot inside the transparent photoresist, various micron/submicron meter structures have been produced based on the reaction time constant depending on the beam intensity. The proposed method is considered to be a costeffective technique for high-aspect-ratio holes and grooves fabrication.