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Excess silicon at the Si[sub 3]N[sub 4]/SiO[sub 2] interface

✍ Scribed by V. A. Gritsenko; I. P. Petrenko; S. N. Svitasheva; H. Wong

Book ID: 121734581
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 329 KB
Volume: 72
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.120786

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