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Thermal stability of Si[sub 3]N[sub 4]/Si/GaAs interfaces

✍ Scribed by Park, D.-G.; Chen, Z.; Diatezua, D. M.; Wang, Z.; Rockett, A.; MorkocÌ§, H.; Alterovitz, S. A.

Book ID: 120663880
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 281 KB
Volume: 70
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.118547

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