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Conduction mechanisms in Ta[sub 2]O[sub 5]/SiO[sub 2] and Ta[sub 2]O[sub 5]/Si[sub 3]N[sub 4] stacked structures on Si

✍ Scribed by Chaneliere, C.; Autran, J. L.; Devine, R. A. B.

Book ID: 121722128
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 334 KB
Volume: 86
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.370756

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