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Origin of the stress-induced leakage currents in Al–Ta[sub 2]O[sub 5]∕SiO[sub 2]–Si structures

✍ Scribed by Novkovski, N.; Atanassova, E.

Book ID: 121800036
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 271 KB
Volume: 86
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1900955

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