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In Situ Ellipsometry Analysis on Formation Process of Al[sub 2]O[sub 3]-Ta[sub 2]O[sub 5] Films in Ion Beam Sputter Deposition

✍ Scribed by Kaneko, Tetsuji; Akao, Noboru; Hara, Nobuyoshi; Sugimoto, Katsuhisa

Book ID: 126962078
Publisher: The Electrochemical Society
Year: 2005
Tongue: English
Weight: 262 KB
Volume: 152
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1861173

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