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High-resolution depth profiling in ultrathin Al[sub 2]O[sub 3] films on Si

✍ Scribed by Gusev, E. P.; Copel, M.; Cartier, E.; Baumvol, I. J. R.; Krug, C.; Gribelyuk, M. A.

Book ID: 121345787
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 434 KB
Volume: 76
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.125694

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