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Effects of Plasma Prenitridation and Postdeposition Annealing on the Structural and Dielectric Characteristics of the Ta[sub 2]O[sub 5]/Si System

โœ Scribed by Lai, Yi-Sheng; Chen, Kuan-Jen; Chen, J. S.


Book ID
121387804
Publisher
The Electrochemical Society
Year
2002
Tongue
English
Weight
134 KB
Volume
149
Category
Article
ISSN
0013-4651

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