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CO/sub 2/ Laser Annealing of Si/sub 3/N/sub 4/, Nb/sub 2/O/sub 5/, and Ta/sub 2/O/sub 5/ Thin-Film Optical Waveguides to Achieve Scattering Loss Reduction

✍ Scribed by Dutta, S.; Jackson, H.E.; Boyd, J.T.; Davis, R.L.; Hickernell, F.S.

Book ID: 114657916
Publisher: IEEE
Year: 1982
Tongue: English
Weight: 906 KB
Volume: 30
Category: Article
ISSN: 0018-9480
DOI: 10.1109/tmtt.1982.1131111

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