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CO2laser annealing of Si3N4, Nb2O5, and Ta2O5thin-film optical waveguides to achieve scattering loss reduction

โœ Scribed by Dutta, S.; Jackson, H.; Boyd, J.; Davis, R.; Hickernell, F.


Book ID
117881432
Publisher
IEEE
Year
1982
Tongue
English
Weight
870 KB
Volume
18
Category
Article
ISSN
0018-9197

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