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Determination of density profile of ultrathin SiO[sub 2]/Si[sub 3]N[sub 4]/SiO[sub 2]/Si(001) multilayer structures using x-ray reflectivity technique

✍ Scribed by Banerjee, S.; Ferrari, S.; Piagge, R.; Spandoni, S.

Book ID: 120653899
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 276 KB
Volume: 84
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1739519

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